A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering)
| Author | : | |
| Rating | : | 4.97 (962 Votes) |
| Asin | : | 0486450287 |
| Format Type | : | paperback |
| Number of Pages | : | 288 Pages |
| Publish Date | : | 2014-02-24 |
| Language | : | English |
DESCRIPTION:
Five Stars Great Price and fast delivery. "Ellipsometry" according to Zoltan Ring. If you are a novice in using ellipsometry you could not pick a better book. If you noticed that certain films, thicknesses or substrates give you problem in measurements with your single wavelength ellipsometer - you will find out why and how to come around them.The book is devided into two sections. The firs. "Good Ellipsometer Intro Guide" according to John Podlesny. This is a good book for starters. It provides a good introduction for what ellipsometry is and what information it provides, equations to understand how the this information, a breakdown of the equipment, and several case studies to understand how this can be used for more intricate samples. The only limit is
This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. This text on optics for graduate students explains how to determine material properties and parameters for inaccess